Introduction to VLSI Process Engineering
Y. Naka, K. Sugawara, C. McGreavy
Integrated circuits are finding ever wider applications through a range of industries. Introduction to VLSI Process Engineering presents the design principles for devices, describes the overall VLSI process, and deals with the essential manufacturing technologies and inspection procedures.
Year:
1993
Edition:
1
Publisher:
Springer
Language:
english
Pages:
224
ISBN 10:
0412395509
File:
DJVU, 1.94 MB
IPFS:
,
english, 1993